http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8367866-B2

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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00
filingDate 2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b4f8ec6aa83510d2ef28a9a9295ff306
publicationDate 2013-02-05-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8367866-B2
titleOfInvention Single-source precursor and methods therefor
abstract A single-source precursor composition includes R 3 B.NX 3 , where B is boron, N is nitrogen, and the R groups and the X groups are selected from hydrogen, alkyl groups, and aryl groups. At least one of the R groups is an alkyl group or an aryl group.
priorityDate 2010-03-19-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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Total number of triples: 25.