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filingDate 2008-04-28-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e99883db31358d0edba62976502eda85
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publicationDate 2013-01-22-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8357242-B2
titleOfInvention Crystalline film devices, apparatuses for and methods of fabrication
abstract Methods of depositing thin film materials having crystalline content are provided. The methods use plasma enhanced chemical vapor deposition. According to one embodiment of the present invention, microcrystalline silicon films are obtained. According to a second embodiment of the present invention, crystalline films of zinc oxide are obtained. According to a third embodiment of the present invention, crystalline films of iron oxide are obtained.
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