http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8354339-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_595840212fb88cfcef684a6a01a24aed http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2221-1031 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76802 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76808 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-768 |
filingDate | 2010-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_836e4c86b39de85c46b56ca5e4808a55 |
publicationDate | 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-8354339-B2 |
titleOfInvention | Methods to form self-aligned permanent on-chip interconnect structures |
abstract | Methods of fabricating a self-aligned permanent on-chip interconnect structure are provided. In one embodiment, the method includes forming a patterned photoresist having at least one opening on a surface of a substrate. A dielectric sidewall structure is then formed on each sidewall of the patterned photoresist and within the at least one opening. A narrowed width opening is present between neighboring dielectric sidewall structures. The patterned photoresist is then removed and thereafter each dielectric sidewall structure is converted into a permanent patterned dielectric structure which is self-aligned and double patterned. At least an electrically conductive material is formed within the narrowed width openings. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10643895-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9761489-B2 |
priorityDate | 2010-07-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 151.