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publicationDate 2013-01-15-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8354296-B2
titleOfInvention Semiconductor structure and circuit including ordered arrangement of graphene nanoribbons, and methods of forming same
abstract A semiconductor structure including an ordered array of parallel graphene nanoribbons located on a surface of a semiconductor substrate is provided using a deterministically assembled parallel set of nanowires as an etch mask. The deterministically assembled parallel set of nanowires is formed across a gap present in a patterned graphene layer utilizing an electric field assisted assembly process. A semiconductor device, such as a field effect transistor, can be formed on the ordered array of parallel graphene nanoribbons.
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