| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_be76fed16f20d3b3a46f142abbaf2685
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_54b2683b98d72a1421850c0cf08d3405
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_777081438cd4d9cf091ab60fe63a41fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_484523d7d8e9e636dbe264c5ce888fc0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4a2d48d0b649a68cb05e4c3bf2684aab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3442d7d3a521f675ee2e0589b0e44266
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d9a60a896f610869ceb18aee6e85357f |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02E60-36 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-04
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-044
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25F3-16 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B57-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B55-02 |
| filingDate |
2006-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e45361f7824e62ff8f94e62ed7b2146d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c63616e43ac72a2bcbfbef01b9ba23bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_78e74caea437525235bd314b9c367329
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9d5a8445ad27141af4627418c202adcd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c7615b4f5351921314bfa1564a9eeafa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69f31375290fb92d576f539dea87f4f1 |
| publicationDate |
2012-12-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8333882-B2 |
| titleOfInvention |
Polishing apparatus and method of polishing work |
| abstract |
The method of polishing a work is capable of reducing a polishing cost, polishing a surface of the work with high polishing accuracy and easily disposing used polishing liquid and used washing liquid. The method comprises the steps of: pressing the work onto a polishing member; feeding polishing liquid; and relatively moving the work with respect to the polishing member. Electrolytic reduced water produced by electrolyzing an electrolyte solution is used as the polishing liquid. |
| priorityDate |
2005-11-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |