http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8330193-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_efb788b18b94e9b540bb3ff912cddd74 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_91a011ba27851a5c42afa823ea97fbf7 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_eb2489c875a3b7df35ea2cb379297278 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee0ea5d195b78f7d6bbd706844852cab |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-4908 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-76 |
| filingDate | 2008-06-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7badda8b1a06cb53f3d0834af1d3f69 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c033b75bfe71b967f60c0f7a2c80c096 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a8d78dde5caf2ac56cd60e1af30e8841 |
| publicationDate | 2012-12-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8330193-B2 |
| titleOfInvention | Silicon oxide film, production method therefor and semiconductor device having gate insulation film using the same |
| abstract | The present invention provides a high-performance silicon oxide film as a gate insulation film and a semiconductor device having superior electric characteristics. The silicon oxide film according to the present invention includes CO2 in the film, wherein, when an integrated intensity of a peak is expressed by (peak width at half height)×(peak height) in an infrared absorption spectrum, the integrated intensity of a CO2-attributed peak which appears in the vicinity of a wave number of 2,340 cm−1 is 8E-4 times or more with respect to the integrated intensity of an SiO2-attributed peak which appears in the vicinity of a wave number of 1,060 cm−1. |
| priorityDate | 2007-06-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 33.