| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca417985a472aa3938671a4f94cd11b4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B19-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45553
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G17-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F9-902
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01G30-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-305
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-30 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F9-90
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F7-08 |
| filingDate |
2009-01-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fe4e988545018113d1ae9e4f6be86861 |
| publicationDate |
2012-11-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8318252-B2 |
| titleOfInvention |
Antimony precursors for GST films in ALD/CVD processes |
| abstract |
The present invention is a process of making a germanium-antimony-tellurium alloy film using a process selected from the group consisting of atomic layer deposition and chemical vapor deposition, wherein a silylantimony precursor is used as a source of antimony for the alloy film. Novel silylantimony compounds are also disclosed. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10199234-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10619244-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8765519-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10208379-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10308673-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9828674-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010267195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11072622-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9269900-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10941487-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11542600-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8697486-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014331928-A1 |
| priorityDate |
2008-01-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |