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filingDate 2011-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56999af9745b2b6ffe44176e64f8d31e
publicationDate 2012-11-20-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8314386-B2
titleOfInvention High collection efficiency X-ray spectrometer system with integrated electron beam stop, electron detector and X-ray detector for use on electron-optical beam lines and microscopes
abstract An X-ray spectrometer systems and methods are provided for implementing signal detection for use on electron-optical beam lines and microscopes. The X-ray Spectrometer System (XSS) includes an X-ray detector (XD) measuring the X-ray signal and positioned proximate to a specimen. An environmental isolation window together with an electron beam stop is disposed between XD and the specimen. The environmental isolation window and the electron beam stop protect XD from electrons directly transmitted through the specimen. An electron detector is located between the electron beam stop and the specimen allowing the measurement of scattered electrons. The XD measures an X-ray signal in the X-ray spectrometer system.
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