| abstract |
The invention relates to a method for fabricating a high-temperature compatible power semiconductor module in which a power semiconductor chip is bonded by means of a diffusion solder layer to a substrate and said substrate is bonded by means of silver sintered layer to a base plate, after which a bonding element is bonded to the top chip metallization. To prevent oxidation of the predefined bond area when producing the diffusion solder layer and the sintered silver layer 4 ′ an anti-oxidation layer is applied to the top chip metallization at least in the region of the predefined bond area. |