http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8308929-B2

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filingDate 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_618199c142dff45a9e9dd034e8ca108b
publicationDate 2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8308929-B2
titleOfInvention Microfluidic systems and methods for screening plating and etching bath compositions
abstract Methods and systems for screening for the effect of bath composition on the performance of electroplating, electroless-plating, electrochemical-etching, electropolishing, and chemical-etching processes are provided. The methods and systems use microfluidic channels that allow for etching or plating studies on an electrode exposed to a multitude of bath compositions at different positions on its surface. After deposition or etching, the electrode surface can be quickly and easily detached from the device for analysis of deposited or etched film properties.
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