http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8308929-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1721d75f5bf603447ec5a26b5c1c0be0 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a452599f70ef405d97d4f80942ee5e07 |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-161 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1683 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C25D21-12 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N27-403 |
filingDate | 2009-06-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_618199c142dff45a9e9dd034e8ca108b |
publicationDate | 2012-11-13-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-8308929-B2 |
titleOfInvention | Microfluidic systems and methods for screening plating and etching bath compositions |
abstract | Methods and systems for screening for the effect of bath composition on the performance of electroplating, electroless-plating, electrochemical-etching, electropolishing, and chemical-etching processes are provided. The methods and systems use microfluidic channels that allow for etching or plating studies on an electrode exposed to a multitude of bath compositions at different positions on its surface. After deposition or etching, the electrode surface can be quickly and easily detached from the device for analysis of deposited or etched film properties. |
isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013331296-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10352899-B2 |
priorityDate | 2006-12-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 53.