http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8298838-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88fc7f9eb617072238851d46591a0c76 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8df16b04fdcf478632cb23cfbae29c57 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3775fbb441ceff2e89d67850da58a883 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-24 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-66 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01R31-26 |
| filingDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fc931b0b10da996b103fa803085ad8f9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80340d04c8da4145b7af056f1c7a90a7 |
| publicationDate | 2012-10-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8298838-B2 |
| titleOfInvention | Method for staining sample |
| abstract | A method for staining a sample includes the following steps. A test device is provided. The test device is sampled to obtain a sample. The sample includes a substrate, an active area disposed within the substrate and having a first doped substrate region and a second doped substrate region, at least one gate disposed between the first doped substrate region and the second doped substrate region, and an exposed shallow trench isolation embedded in the substrate and surrounding the active area. A first staining procedure is then carried out to selectively remove the shallow trench isolation to form a first void and to entirely expose the active area. A second staining procedure is subsequently carried out to selectively stain the first doped substrate region and the second doped substrate region to form a second void. |
| priorityDate | 2010-02-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 25.