http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8288249-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6b822ee046eb6c45d1e3bd9ce9c1782e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1dc627475cff8137e23b75280ad5b34e http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ca8134cac682b6e7abee03d371bcbbf2 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76254 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-84 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-30 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-46 |
| filingDate | 2011-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_83d44499ea903c425e8d2a88270f5d00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_09b6894da94da5941745d1d5283d4e0b |
| publicationDate | 2012-10-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8288249-B2 |
| titleOfInvention | Method for manufacturing SOI substrate |
| abstract | Manufacturing cost of an SOI substrate is reduced. Yield of an SOI substrate is improved. A method for manufacturing an SOI substrate includes the steps of irradiating a single crystal semiconductor substrate with ions to form an embrittled region in the single crystal semiconductor substrate, bonding the single crystal semiconductor substrate to a base substrate with an insulating film therebetween, and separating the single crystal semiconductor substrate and the base substrate at the embrittled region to form a semiconductor layer over the base substrate with the insulating film therebetween. In the step of forming the embrittled region, ion species which are not mass-separated are used as the ions and a temperature of the single crystal semiconductor substrate is set to 250° C. or higher at the time of irradiation with the ions. |
| priorityDate | 2010-01-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 63.