| abstract |
A salt represented by the formula (I-BB): n nwherein Q 1 and Q 2 each independently represent a fluorine atom etc.,n X 1 represents a single bond etc., Y 1 represents a C1-C36 aliphatic hydrocarbon group etc., A 1 and A 2 independently each represents a C1-C20 aliphatic hydrocarbon group etc., Ar 1 represents a (m 4 +1)-valent C6-C20 aromatic hydrocarbon group which can have one or more substituents, B 1 represents a single bond etc., B 2 represents a C4-C36 alicyclic hydrocarbon group which has one or more —OX a groups and which is not capable of being eliminated by the action of an acid etc., and X a represents a hydrogen atom or a group capable of being eliminated by the action of an acid, m 1 and m 2 independently each represents an integer of 0 to 2, m 3 represents an integer of 1 to 3, with the proviso that m 1 plus m 2 plus m 3 equals 3, and m 4 represents an integer of 1 to 3. |