| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bdb1a0330b502ad21b61a34e4986d644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_05588ab544563467eb24e31af1f26435
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8cf8d77ac0eff1767b22d2fb9445b64d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfb0351bed4dc51d813bd013ebed52bf |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N21-68 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67028
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67069 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C25F3-30 |
| filingDate |
2008-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d5519b0f3eb0b5e02f209562dbee39ee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_10cfef0e3557d34c86a644edeacba5a6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d658ee105727e90f3d50b409bdd59dc3 |
| publicationDate |
2012-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8257503-B2 |
| titleOfInvention |
Method and apparatus for detecting plasma unconfinement |
| abstract |
A method for detecting plasma unconfinement in a reaction chamber during a bevel edge cleaning operation is provided. The method initiates with selecting a wavelength associated with expected by products of a bevel edge clean process. The method includes cleaning the bevel edge area of a substrate and monitoring the intensity of the selected wavelengths during the cleaning for deviation from a threshold wavelength intensity. The cleaning is terminated if the deviation from the threshold wavelength intensity exceeds a target deviation. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2019267268-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10636686-B2 |
| priorityDate |
2008-05-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |