| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0fd605903581ac32f4d750155c2b6d54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_89af0bde61ee35284d4fafcb598f1f67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_69a758895ccecb2166f9df7645c18cb0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_53c8ba9f5bb6c1822c6d31bfcc07923c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063a1b324005ddc15e16e7529c6258c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c2f42246a5ccd03418aad54ceb7c9986
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7842adadba8c8ab609c9f995063b3b76
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_8608ba743b941f02f155b75284bde817 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-2236
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32633
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32458
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32623
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J37-32412 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-00 |
| filingDate |
2006-03-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ed4e464e6bb66da80483a615e99ef22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf15e9cea4c3d300e17f4e8b8082ab7f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bca2b962de026b30da828bc82d641dfe
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_56b336be3eb1cd9f4348ee0760152170
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f1536d23ace37261d230720923767e16
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f005d3ad69990236f96341dc78e1c780
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0d4d7529c334656eb6e6ba13ffc439d8 |
| publicationDate |
2012-09-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8257501-B2 |
| titleOfInvention |
Plasma doping device with gate shutter |
| abstract |
In a plasma doping device according to the invention, a vacuum chamber ( 1 ) is evacuated with a turbo-molecular pump ( 3 ) as an exhaust device via a exhaust port 11 while a predetermined gas is being introduced from a gas supply device ( 2 ) in order to maintain the inside of the vacuum chamber ( 1 ) to a predetermined pressure with a pressure regulating valve ( 4 ). A high-frequency power of 13.56 MHz is supplied by a high-frequency power source ( 5 ) to a coil ( 8 ) provided in the vicinity of a dielectric window ( 7 ) opposed to a sample electrode ( 6 ) to generate inductive-coupling plasma in the vacuum chamber ( 1 ). A high-frequency power source ( 10 ) for supplying a high-frequency power to the sample electrode ( 6 ) is provided. Uniformity of processing is enhanced by driving a gate shutter ( 18 ) and covering a through gate ( 16 ). |
| priorityDate |
2005-03-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |