| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9d60017d3c7d93ab07cf8c0b53bffd10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2ec11098fac90005090b2219d599f03b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3423ae9ae55ee322b5a169d4d6c9f0c0
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_596f7ae3e79bc578e17a444424a1dee6 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-94
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16235
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B2203-0338 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81B3-0005
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G02B26-0833 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-10 |
| filingDate |
2011-04-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4e341b988286ee0a4f10875f88a5c403
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb070c7580b4e6e0f511db84134d182f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bcfb3d562e6d60cad11f470fd29e769a |
| publicationDate |
2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8247879-B2 |
| titleOfInvention |
Micromechanical device with microfluidic lubricant channel |
| abstract |
A micromechanical device assembly includes a micromechanical device enclosed within a processing region and a lubricant channel formed through an interior wall of the processing region and in fluid communication with the processing region. Lubricant is injected into the lubricant channel via capillary forces and held therein via surface tension of the lubricant against the internal surfaces of the lubrication channel. The lubricant channel containing the lubricant provides a ready supply of fresh lubricant to prevent stiction from occurring between interacting components of the micromechanical device disposed within the processing region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10290828-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017207413-A1 |
| priorityDate |
2006-09-27-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |