| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b051f9f7933c758e66f6ceda5c9fb2cc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9ca743ad0e0bcabfab2ba60d8987c048
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_780ee4760c1d405e15d27f3b02925aee
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6086677985b292239f32f3f4d9dc357b |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F5-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F3-003
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C225-06 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07C49-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F5-00 |
| filingDate |
2008-11-06-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2e5f496abd9fa443785ff9113c8c5241
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ddf8ddc89d37ba73206e65c1c01cb2e6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c832bb5cf90c777d5bf4926b47900951 |
| publicationDate |
2012-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8247617-B2 |
| titleOfInvention |
Group 2 metal precursors for depositing multi-component metal oxide films |
| abstract |
Novel Sr and Ba complexes containing both beta-diketonates and N-methyl-pyrrolidone were synthesized and characterized. TGA experiments indicated these complexes are volatile, they can be employed as precursors for ALD strontium titanate (STO) or barium strontium titanate films (BST) films in semiconductor fabrication. |
| priorityDate |
2007-05-16-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |