| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c3a2f00e72ba6e4c09b6da573427fbed
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_26c5e6086c0340d158646079b7ba8e09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ddda47cd9b3229e6e1821aad1360d790
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_28e211cf0c54cc8fda920874fe7f14e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbdd6622228efd4364086f33ef6006b3 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y02P20-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D11-0203
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02175
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D11-0407
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02123
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02115
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B01D15-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07C2604-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02101
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02282 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-316
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-122 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D1-18 |
| filingDate |
2005-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_94c340b40034aaf8ca9cb1c5c75751fc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_780b991b0e903ac7d7510ad7cebf3263
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_77b4d1490268a5fb58d0ee2cdf4762cf |
| publicationDate |
2012-08-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8241708-B2 |
| titleOfInvention |
Formation of insulator oxide films with acid or base catalyzed hydrolysis of alkoxides in supercritical carbon dioxide |
| abstract |
Metal and/or silicon oxides are produced by hydrolysis of alkoxide precursors in the presence of either an acid catalyst or a base catalyst in a supercritical fluid solution. The solubility of the acid catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis base that is soluble in the supercritical fluid. The solubility of the base catalysts in the supercritical fluid can be increased by complexing the catalyst with a Lewis acid that is soluble in the supercritical fluid. The solubility of water in the solution is increased by the interaction with the acid or base catalyst. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108467059-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-108467059-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9676944-B2 |
| priorityDate |
2005-03-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |