| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_afdb31ccf8f4e76be5fbdfbb741e1369
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5eba2a9bc0c8fb7be5a26790e0ddc420
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_dc3e639586089fe232d0cfb27383c875
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_caca5421bb421b7ba8e7a13be98c0d3e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_900efd82417bba0fbbf6a7f731ef08f8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ef1f091ef92dd619ed9480b11f81eab1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_cfdc3eb8dfe0f15b5d87b80765fa1e4c |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249969
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01P2004-03
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-12993
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249956
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249957 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1208
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-87
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-5035
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3065
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-113
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-009
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C04B41-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1254
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C18-1245 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-26 |
| filingDate |
2011-02-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a40c91254ec2a2107a2165289178e60e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5fb4717319ad8ebd1bb5712e9a73a618
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b50eda6c9c4e2db3499f335102bcb68e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_627576789821c08b67d7abc1e01ff828
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8943c014e528f5df2a1ecdfd3ccb0906 |
| publicationDate |
2012-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8231967-B2 |
| titleOfInvention |
Surface-treated ceramic member, method for producing the same and vacuum processing apparatus |
| abstract |
Disclosed is a surface-treated ceramic member which has a coating film-formed surface comprising a ceramic sintered body with a porosity of 1% or less and a sol-gel coating film of a silicon alkoxide compound polymer formed on at least a part of a ceramic sintered body, wherein the coating film and the surface of the body are coexistent in the coating film-formed surface. Specifically the area of the sol-gel coating film accounts for 5 to 80% of the total area of the coating film-formed surface. The surface-treated ceramic member has excellent corrosion resistance and is free from scattering of particles. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9646737-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015380124-A1 |
| priorityDate |
2008-08-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |