| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0ab096d14cbed82cad0fd2a278618262 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C2201-019 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-0019 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-4763 |
| filingDate |
2006-10-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0545465967738c8a02ca202337f14721 |
| publicationDate |
2012-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8216931-B2 |
| titleOfInvention |
Methods for forming multi-layer three-dimensional structures |
| abstract |
Embodiments are directed to the formation of multi-layer three-dimensional structures by forming and attaching a plurality of layers where each of the plurality of layers comprises at least one structural material forming a pattern and where at least one of the plurality of layers comprises at least one sacrificial material. In one embodiment, the formation of a multi-layer three-dimensional structure comprises (1) forming a plurality of individual layers and (2) attaching at least the formed plurality of individual layers together. In another embodiment, the formation of a multi-layer three-dimensional structure comprises (1) attaching an individual layer onto a substrate or onto a previously formed layer; (2) processing the attached individual layer to form a new layer comprising at least one material forming a pattern; and (3) repeating the steps of (1) and (2) one or more times. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-102282860-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017365484-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10633758-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2016116924-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2015061496-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107208256-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10688692-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10193004-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/KR-20170103826-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10629442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-107208256-B
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9925797-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10864096-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10471538-B2 |
| priorityDate |
2005-03-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |