http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8206788-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_986d0ab29fa7910a46cd21a12d682fe4 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_41c2c1c5b8db7c8a27f8b2b0feac7f04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ac091702674d0bae9113f78d86bd4d39 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-249953 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3105 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02074 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76826 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D3-10 |
| filingDate | 2007-07-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2012-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_577d9065c137f09dee9c6402ac14a0de http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2da3655293f8c6537de8e9b84d8378a6 |
| publicationDate | 2012-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8206788-B2 |
| titleOfInvention | Method for treating a damaged porous dielectric |
| abstract | In the manufacture of electronic devices that use porous dielectric materials, the properties of the dielectric in a pristine state can be altered by various processing steps. In a method for restoring and preserving the pristine properties of a porous dielectric layer, a substrate is provided with a layer of processed porous dielectric on top, whereby the processed porous dielectric is at least partially exposed. A thin aqueous film is formed at least on the exposed parts of the processed porous dielectric. The exposed porous dielectric with the aqueous film is exposed to an ambient containing a mixture comprising at least one silylation agent and dense CO 2 , resulting in the restoration and preservation of the pristine properties of the porous dielectric. |
| priorityDate | 2007-03-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 43.