| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fb63610798778c2d65df275b5810fd1d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_59f73c42b8d2a40fc9b8e304242e17ab
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f85f11ebc0c226c8c2e3dfdbd87f7d62 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67253 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N29-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G06F19-00 |
| filingDate |
2008-03-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_39bba120c9fadf16c9226abaa82e89d5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0538d76131ecbb2f601c8d4b9717f19e |
| publicationDate |
2012-06-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8200353-B2 |
| titleOfInvention |
Measuring apparatus |
| abstract |
Measuring apparatus and method for monitoring fabrication of a semiconductor wafer by exciting and measuring vibrations of the wafer substrate. A measurable parameter of vibration (e.g. frequency) is indicative of mass of a vibrating region. Mass change caused by wafer treatment is reflected in changes in vibration measurements taken before and after that treatment. The apparatus includes a wafer support e.g. projecting ledge ( 19 ), a vibration exciting device e.g. contact probe ( 28 ) or pressure differential applicator, and a measurement device e.g. frequency sensor ( 62 ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10081869-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9478408-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10047438-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10704149-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9899195-B2 |
| priorityDate |
2007-03-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |