| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bcff13f8573db698307f919e6385d5c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_44b22f096438dc7e0c6f966af525d465
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_34494a0bb28df7aab661bec49da554ce
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_9a255d2593f7f1340c57359e41ab9699 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-24137
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N1-37205
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/A61N1-0541
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12044 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-24
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5387
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-4846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L24-82 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-48 |
| filingDate |
2010-08-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_df828ba0c38a87995073c96703d8daeb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efd1d8dcfa3803b29380955b350e43a2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a550394734cfa36fddb0e921b9f7d840 |
| publicationDate |
2012-06-05-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8193645-B2 |
| titleOfInvention |
Wafer-level, polymer-based encapsulation for microstructure devices |
| abstract |
A device includes a first device structure having a semiconductor platform, and a second device structure having a microstructure spaced from the semiconductor platform. The device further includes a cable having a plurality of beams to couple the microstructure to the first device structure. Each beam of the plurality of beams has a polymer coating and a serpentine-shaped region. |
| priorityDate |
2005-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |