http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8188299-B2
Outgoing Links
Predicate | Object |
---|---|
assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33dafb5bbc2ec47ebcb7becbbe60f704 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_17723c22be33498214d3dcb9d2239b37 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c8c0b89187c09598f56adde705385ede http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_913ada43e153a7e0bed46d16986fbea9 http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b13c9d8851ae5605e6a452608cb7a9aa |
classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D491-18 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07D209-02 |
classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07D209-56 |
filingDate | 2010-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate | 2012-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f5bb5cf34fad8e06d434531b771ce01f http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_24ec473b24326d84a2f34efefbdcadbb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_0c38b778f1923edaf9e25f852e85611c http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_da1b0367a2d1c4f8ba8113d4de16eb59 |
publicationDate | 2012-05-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber | US-8188299-B2 |
titleOfInvention | Acrylate derivatives, alcohol derivatives, and method for producing them |
abstract | Provided are an acrylate derivative useful as a raw material of a polymer compound for resist compositions capable of giving resist patterns which are excellent in lithographic performance and have a good shape, an intermediate thereof (alcohol derivative) and production processes for them. To be specific, it is an acrylate derivative represented by a formula shown below: n n(wherein R 1 represents a hydrogen atom, methyl or trifluoromethyl; R 2 , R 3 , R 5 , R 7 , R 8 , R 9 and R 10 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms; R 4 and R 6 each represent independently a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, a cycloalkyl group having 3 to 6 carbon atoms or an alkoxy group having 1 to 6 carbon atoms, or both of R 4 and R 6 are combined to represent an alkylene group having 1 to 3 carbon atoms, āOā or āSā; and R 11 represents a hydrogen atom, an alkyl group having 1 to 6 carbon atoms or a cyclic hydrocarbon group having 3 to 10 carbon atoms). |
priorityDate | 2010-09-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 630.