| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f9c2e1af948ed88b1d501e78d99fe780
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ecc8287acee5a111b6a70c5e38544ce7
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b63256a9094d37e0c389bac549e3bb13 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0392 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-039
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004 |
| filingDate |
2009-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_443a5fc7b6b29914e8928b5ad7ed5509
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7428bc19eb566b315626bb861ca2e40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4854b804b03ece556684169d8fbca507 |
| publicationDate |
2012-05-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8182978-B2 |
| titleOfInvention |
Developable bottom antireflective coating compositions especially suitable for ion implant applications |
| abstract |
Compositions characterized by the presence of an aqueous base-soluble polymer having aromatic moieties and aliphatic alcohol moieties have been found which are especially useful as developable bottom antireflective coatings in 193 nm lithographic processes. The compositions enable improved lithographic processes which are especially useful in the context of subsequent ion implantation or other similar processes where avoidance of aggressive antireflective coating removal techniques is desired. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8999624-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012178029-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8557501-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9040225-B2 |
| priorityDate |
2009-02-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |