| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_568f91172889558732adbc5df6d72ce5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4f7de318bdc706d720d39ec2ad8575e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b0a6f27764bb93b95a4115c6b7b5b860
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_786d9e8d37517807f3b5cefc4825026f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_5c4247a1fbe0f2fdc602289caa7da270
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bb4ee28d43b5e8d4a3c5141fa9bcfeb0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L79-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L77-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L27-18
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L101-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G73-101 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L79-08
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08G73-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C08L101-00 |
| filingDate |
2008-11-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_317cd991c2d6a12ec766605146aabc8b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_31d5ddd93723f3041d18c5adf6186717
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a5cdd17857795e2d897b77394fdabf2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d7ae9ae8bb2f8e839fff94feb937554a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e7e46f4c21e8da455d229ed6c4623fc1 |
| publicationDate |
2012-05-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8173727-B2 |
| titleOfInvention |
Crosslinkable elastomer composition and molded article using the same |
| abstract |
The present invention provides a crosslinkable elastomer composition, in which generation of HF under high temperature conditions is reduced, the decrease in weight to both NF 3 plasma treatment and O 3 treatment in the semiconductor manufacturing process is small and generation of foreign substances (particles) in these treatments is suppressed significantly. Specifically, the present invention relates to a crosslinkable elastomer composition comprising a crosslinkable elastomer and a filler having a specific surface area of at least 0.5 m 2 /g and containing a synthetic polymer having a thermally and chemically stable aromatic ring in the main chain, a crosslinkable elastomer composition comprising a crosslinkable elastomer and nonoxide ceramics and a crosslinkable elastomer composition wherein the decrease in weight by NF 3 plasma irradiation is at most 0.20%. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012289641-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019078238-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010140222-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11753523-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9914818-B2 |
| priorityDate |
2001-12-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |