| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d08748b0b75b8253d28c1ae65630bf6a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_83a81fc17053ef7af087c1f1d058f1c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_063e4ce32e4d4a81303f20df9d856686
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7d897bcf7e89eb8d8f7f4af3b7ccecf5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_47cc435e1d443f13180f7766df104d9d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70ce40fa12913a05798046375db7641f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_034c587f33b499080bb80cd5f0fbfb9e |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-24802 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-075
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0757
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0233 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L33-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-92
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B32B3-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03C1-00
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-00 |
| filingDate |
2007-09-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_662f048d7e78db0d29717df3418b2b61
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9f7c41f00ff676f314a591f96089ed1b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_14b13a2c266122c5f4cf33a5eaecc1bf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5090771f3d3906f94446b54a32ebc0c4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4ec5be8ad93fd1ce27c93afb03614cc3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_42a1f87953a6433babaa3d14f9c9dd9d |
| publicationDate |
2012-04-17-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8158981-B2 |
| titleOfInvention |
Radiation-sensitive composition, method of forming silica-based coating film, silica-based coating film, apparatus and member having silica-based coating film and photosensitizing agent for insulating film |
| abstract |
The present invention provides a photosensitive resin composition comprising a component (a): a siloxane resin obtained by hydrolyzing and condensing a silane compound comprising a compound represented by the general formula (1) shown below, a component (b): a solvent dissolving the component (a) therein, and a component (c): a quinonediazide sulfonic acid ester. n n n n n n n n n n n n wherein R 1 represents an organic group; A represents a divalent organic group; and X represents a hydrolyzable group, wherein plural X groups in one molecule may be the same or different. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10906616-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8883397-B2 |
| priorityDate |
2006-09-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |