| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3a62c92e56568bd104089aac22ca487b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_bbbaad0b9be8cba3dcacb1dbf772bf0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_6654f065b3d87c498079bd2dc48d1860 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-09
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11 |
| filingDate |
2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_efad6975490681c5aa9170e08dd27934
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3ee672d590775a63155db60e37d446fc |
| publicationDate |
2012-04-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8153351-B2 |
| titleOfInvention |
Methods for performing photolithography using BARCs having graded optical properties |
| abstract |
Photolithography methods using BARCs having graded optical properties are provided. In an exemplary embodiment, a photolithography method comprises the steps of depositing a BARC overlying a material to be patterned, the BARC having a refractive index and an absorbance. The BARC is modified such that, after the step of modifying, values of the refractive index and the absorbance are graded from first values at a first surface of the BARC to second values at a second surface of the BARC. The step of modifying is performed after the step of depositing. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9312191-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9373552-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014134759-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9128384-B2 |
| priorityDate |
2008-10-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |