| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1b49b135f099e96a0e4cab2427a48ae8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ccda58eab3ae0d6a9505587d0cfe90e0 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C07F11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C07F11-00 |
| filingDate |
2007-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_80402b488c23aeafd45e39abacf6c708 |
| publicationDate |
2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8148564-B2 |
| titleOfInvention |
Compounds for forming metal nitrides |
| abstract |
Nitride forming precursors are heated to form a metal nitride on a substrate. In some variations, the precursors are contacted with the substrate which has previously been heated to a sufficient temperature to form a nitride film. Precursors to tungsten and molybdenum nitride are provided. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11760768-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11390638-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11459347-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9540730-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11434254-B2 |
| priorityDate |
2006-08-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |