http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148274-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f2f20b49876ddf17adb2bba82d53c4b6
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70bc142c6049719394ef212e1f773e62
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c44ac80df593e1c4737c475bdd342593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_f85539d1fcb22dcc679075d6c02b6473
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ee86e991b708524aace80165ff0846c9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c175fa382f9096d49567d89afd6636e3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_3417710519b76e744e6d5db20e961e06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fae05ee35f1acc23572e18f79194b499
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2dda3968750803c97d6ea70b8ce10b81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_15921bffcd9c299ee9738aba77178593
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_462e74de7bb4fe940bb6a37115b24d88
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76807
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-6831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-5222
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67109
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76831
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02178
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02186
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76814
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76874
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-67748
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68771
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53238
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-53295
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-482
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-68742
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-31616
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28562
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23C16-45536
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-28556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76864
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76873
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76846
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76855
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76858
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02244
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76835
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02255
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76843
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76828
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-469
filingDate 2008-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_85223e740cbb15df1878aceeb6ae4586
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9c3c9ef33791b68b16f782bf1b7d139f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ae2880d443403fc27e3076e110f1fa48
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e3d40196e3cf97e8ba32da24fbeb643f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5a6d23c6ae2c91728a996ac8b1288c67
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f00967597dc8569f08bb15ae8b650f54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3a2e88092b719b9183647c8bfc92f037
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_519f6b9ac40077a2f4c8179b2ce81275
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee806c567b818fec272e477262ccad0c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2285ac743c23190632082f58b01378c3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34ec6504a62f950dc7e3fa13e7981cbc
publicationDate 2012-04-03-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-8148274-B2
titleOfInvention Semiconductor device having oxidized metal film and manufacture method of the same
abstract A method for manufacturing a semiconductor device includes heating a substrate having an insulation film thereon to a first substrate temperature so that oxidizing species are emitted from the insulating film, the insulating film having a recessed portion formed in a surface thereof, forming a metal film on the insulating film at a second substrate temperature lower than the first substrate temperature, and oxidizing at least part of the metal film with oxidizing species remaining in the insulating film.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9129970-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008023838-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8883642-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9343402-B2
priorityDate 2005-01-21-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6432820-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008090410-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10125782-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6485564-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006091559-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-H10256372-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2004014763-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6162741-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2001196453-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2003116854-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008122102-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7014709-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2003297814-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-6136702-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2000124307-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/JP-2002170821-A
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127935122
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID79102
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID68424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129573621

Total number of triples: 89.