| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_2a390a92f1d4e2c9274d984f977694f2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_294881271413951a95f284b588a68e66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0e23e5f782635669780d005617271f4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aa3f4c071478c8a0dad071d38aeb21b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c227663b5263e0cbea865b321d9a6644
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4cc9ebdc627ec91655e00af0d846e556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_373329814848c13ce8dd407e403bf090 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-3202
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L33-24 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-227
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01S5-223 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2009-08-11-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f0d393fc89b103bebdb0e986d420326d
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1d65cc0a12bd0c9f9aa879d407f59bb1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd15bbe2ec09b159038d74af961d9666
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_dc605a9afaa91bbfb217254aebae19c1
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1f5d77a89078b15aa7f4f6687b1b9321
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b42f4fef8adfa18067353e39e2ff852b |
| publicationDate |
2012-03-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8138002-B2 |
| titleOfInvention |
Semiconductor light-emitting element, fabrication method thereof, convex part formed on backing, and convex part formation method for backing |
| abstract |
A convex part formation method of forming a convex part in parallel with a <110> direction of a backing on the backing having a {100} face as the top surface thereof, includes: (a) forming a mask layer in parallel with the <110> direction on the backing; (b) etch the backing so as to form a convex-part upper layer whose sectional shape on a cutting plane corresponding to a {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of θ U ; and (c) further etching the backing so as to form a convex-part lower layer whose sectional shape on the cutting plane corresponding to the {110} face is an isosceles trapezoid, the base of which is longer than the upper side thereof, and the side surface of which has an inclination of θ D (where θ D ≠θ U ). |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8604338-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8404513-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012301993-A1 |
| priorityDate |
2008-08-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |