| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_d76e0601c567a94d33a49afada407db8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_0e433c1625fc509a087c912b440da84b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fece053e8c2ceac625d987b734f7c91a |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-16195
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-54
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B81C1-00285 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L23-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-54 |
| filingDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3e08ed8dd4b9afad78b679595c5f22bb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ef603a31266658638af176d572e28553 |
| publicationDate |
2012-02-21-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8120155-B2 |
| titleOfInvention |
Reduced stiction and mechanical memory in MEMS devices |
| abstract |
A MEMS device is packaged in a process which hydrogen (H) deuterium (D) for reduced stiction. H is exchanged with D by exposing the MEMS device with a deuterium source, such as deuterium gas or heavy water vapor, optionally with the assistance of a direct or downstream plasma. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11253963-B1 |
| priorityDate |
2008-07-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |