| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_da3b6ec3e3e092be5a8d375f17a6423b
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_70029750dc371a0d27615099932c2b46
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_046bd617556639e42d8384cec3dd333b |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1608
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T428-2993 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02024
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1472
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1463
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K3-1409 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24D3-06 |
| filingDate |
2006-09-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_88b5b2ab0bfc7731947a91f9292c0432
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7391378c22fb59e3e1bed18083a3ab38 |
| publicationDate |
2012-01-31-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8105135-B2 |
| titleOfInvention |
Polishing slurries |
| abstract |
A polishing slurry includes liquid medium and particulate abrasive. The particulate abrasive includes soft abrasive particles, hard abrasive particles, and colloidal silica particles, wherein the soft abrasive particles have a Mohs hardness of not greater than 8 and the hard abrasive particles have a Mohs hardness of not less than 8, and wherein the soft abrasive particles and the hard abrasive particles are present at a weight ratio of not less than 2:1. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11078380-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10626297-B2 |
| priorityDate |
2005-09-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |