| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_25c4d3caf29eedd7aea2851f902c8e25
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_986d0ab29fa7910a46cd21a12d682fe4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_1768b0a1734bf35fbffe3c1b65d914dc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_7b81a1bdc6bfe406baa0c73d8f4e1b4f |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F3-06
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-3212 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09G1-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-321 |
| filingDate |
2009-06-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ba1420b0f93fd9b55d132df1f617fe66
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_91a506d674b7c56fb1c955d3f97bc356
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_8a64faf496eae2e24915f9745633d174 |
| publicationDate |
2011-12-20-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8080505-B2 |
| titleOfInvention |
Slurry composition and method for chemical mechanical polishing of copper integrated with tungsten based barrier metals |
| abstract |
The present invention is related to a slurry composition for polishing copper integrated with tungsten containing barrier layers and its use in a CMP method. The present invention is also related to a method for polishing copper integrated with tungsten containing barrier layers by means of an aqueous solution containing abrasive particles, an inorganic acid such as HNO 3 as etchant for copper that prevents galvanic corrosion of the tungsten containing metal barrier and at least one organic compound to provide sufficient copper corrosion inhibition. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9627500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11462442-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11043430-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10388574-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10734288-B2 |
| priorityDate |
2004-07-15-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |