| abstract |
The present invention provides a polyhydric compound represented by the formula (I): n nwherein R 51 to R 67 each independently represent a hydrogen atom etc., at least one selected from the group consisting of R 1 to R 5 is a group represented by the formula (II):n n nwherein Q 1 and Q 2 each independently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., and A + represents an organic counter ion, andn nthe others are hydrogen atoms or groups represented by the formula (III):n n nwherein X 1 to X 4 each independently represent a hydrogen atom etc., n represents an integer of 0 to 3, W represents any one of the following groups:n n nZ 1 represents a C1-C6 alkyl group etc., and ring Y represents a C3-C20 alicyclic hydrocarbon group, andn na chemically amplified resist composition containing the same. |