http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8052889-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_33cf281df1fdf76b7da1bb88a75ba80d |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-02 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-04 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09K13-06 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-32134 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C23F1-20 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C09K13-00 |
| filingDate | 2009-08-04-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_99bf948df7f110adef3886978d91bedb http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7c87c2a82fcc7beffe83056bbc2991c6 |
| publicationDate | 2011-11-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-8052889-B2 |
| titleOfInvention | Etchant composition, and methods of patterning conductive layer and manufacturing flat panel display device using the same |
| abstract | An etchant composition, and methods of patterning a conductive layer and manufacturing a flat panel display device using the same are provided. The etchant composition may include phosphoric acid, nitric acid, acetic acid, water and an additive, wherein the additive includes a chlorine-based compound, a nitrate-based compound, and an oxidation regulator. In addition, the flat panel display device may be manufactured by patterning a gate electrode, source/drain electrodes and a pixel electrode using the same etchant composition. The gate electrode, source/drain electrodes and the pixel electrode may be formed of different conductive materials. Accordingly, processes are simplified so that manufacturing costs may be reduced and productivity may be improved. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015111340-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8921230-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9530670-B2 |
| priorityDate | 2005-08-08-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 39.