| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_b2d32a1324eb3a240649ffee8d475d63 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02129
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-022
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-02164
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76232 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-00 |
| filingDate |
2010-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_114019b28ae707241bb194f2a5e718ba
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_fd630da97bd70a444e6c45fca2b7b439
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a053409d6b0db65840b924213aab5b83
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_be8cc0fea71c0d87573c266bbc616131 |
| publicationDate |
2011-10-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-8043884-B1 |
| titleOfInvention |
Methods of seamless gap filling |
| abstract |
A method for seamless gap filling is provided, including providing a semiconductor structure with a device layer having a gap therein, wherein the gap has an aspect ratio greater than 4. A liner layer is formed over the device layer exposed by the gap. A first un-doped oxide layer is formed over the liner layer in the gap. A doped oxide layer is formed over the first undoped oxide layer in the gap. A second un-doped oxide layer is formed over the doped oxide layer in the gap to fill the gap. An annealing process is performed on the second un-doped oxide layer, the doped oxide layer, and the first un-doped oxide to form a seamless oxide layer in the gap, wherein the seamless oxide layer has an interior doped region. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11127680-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-112366205-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2017287842-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9397002-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-103151295-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2019040046-A1 |
| priorityDate |
2010-05-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |