| abstract |
An acid generator represented by the following formula (1) is provided: n nwherein X represents an alkylene group having 1 to 10 carbon atoms, —X 1 —O—X 2 —, or a heteroatom selected from the group consisting of nitrogen, sulfur and fluorine; X 1 and X 2 each independently represent an alkylene group having 1 to 10 carbon atoms; Y represents a cyclic hydrocarbon group having 5 to 30 carbon atoms and containing one or more aromatic rings, while one or more hydrogen atoms on the ring of the cyclic hydrocarbon group may be substituted by one or more members selected from the group consisting of —O—Y 1 , —CO—Y 2 , an alkyl group having 1 to 6 carbon atoms, an alkoxy group having 1 to 6 carbon atoms, a perfluoroalkyl group having 1 to 4 carbon atoms, a perfluoroalkoxy group having 1 to 4 carbon atoms, a hydroxyalkyl group having 1 to 6 carbon atoms, a halogen atom, a hydroxyl group and a cyano group; Y 1 and Y 2 each independently represent an alkyl group having 1 to 6 carbon atoms; n represents an integer of 0 or 5; and A + represents an organic counterion. |