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grantDate 2011-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2011-08-16-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7998335-B2
titleOfInvention Controlled electrochemical polishing method
abstract The invention relates to a method of polishing a substrate comprising at least one metal layer by applying an electrochemical potential between the substrate and at least one electrode in contact with a polishing composition comprising a reducing agent or an oxidizing agent.
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