| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_fdad00677b9268c26e005a9e03a7b9dd |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-0002 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L23-481
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-76898 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-72 |
| filingDate |
2009-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_30d31e06a491c00b1cf00f4ff541cacb |
| publicationDate |
2011-08-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7994641-B2 |
| titleOfInvention |
Semiconductor device and method of fabricating the same |
| abstract |
A semiconductor device according to one embodiment includes: a substrate having an element region where a semiconductor element is formed; a via hole formed in a portion of the substrate adjacent to the element region; a conducting portion provided in the via hole via an insulating layer; and a buffer layer provided between the substrate and the insulating layer, wherein the buffer layer is made of a material in which a difference in thermal expansion coefficient between the substrate and the buffer layer is smaller than that between the substrate and the insulating layer. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011068476-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8916468-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11682583-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10157791-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012292746-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8916979-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2014327151-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9263382-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8580652-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2015011083-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9214374-B2 |
| priorityDate |
2008-06-26-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |