Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_e757fd4fedc4fe825bb81b1b466a0947 |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D7-52 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D153-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C09D125-14 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08L53-00 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B05D5-00 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B05D5-00 |
filingDate |
2008-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2011-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6d29f26086ba4589c556af186b1107af http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_823e7f76e3bd845af672674de250d7fe http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ee54e4403803c9a1a560614dbb73f546 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_379049f1c7772197dc5fd6c39cb0e9ae http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a05c52541be0966304a9a6c4593e1f26 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_469ba2cf6b86e5380ce8f877b794be89 |
publicationDate |
2011-08-02-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7989026-B2 |
titleOfInvention |
Method of use of epoxy-containing cycloaliphatic acrylic polymers as orientation control layers for block copolymer thin films |
abstract |
Disclosed herein is a method of controlling the orientation of microphase-separated domains in a block copolymer film, comprising forming an orientation control layer comprising an epoxy-containing cycloaliphatic acrylic polymer on a surface of a substrate, irradiating and/or heating the substrate to crosslink the orientation control layer, and forming a block copolymer assembly layer comprising block copolymers which form microphase-separated domains, on a surface of the orientation control layer opposite the substrate. The orientation control layer can be selectively cross-linked to expose regions of the substrate, or the orientation control layer can be patterned without removing the layer, to provide selective patterning on the orientation control layer. In further embodiments, bilayer and trilayer imaging schemes are disclosed. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9417520-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2013344242-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9535326-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9314819-B2 |
priorityDate |
2008-01-12-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |