http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7956345-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c36eb66e453b1591097e8cb973600162 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H10K85-221 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B82Y10-00 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-06 |
| filingDate | 2008-01-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_72f9aa35f3b9bab94872a87a989cea56 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_5e630ff8ece053169c9aa1e06487e5e8 http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_34a78b1d8a129027e4a45132c8a41ca3 |
| publicationDate | 2011-06-07-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7956345-B2 |
| titleOfInvention | CNT devices, low-temperature fabrication of CNT and CNT photo-resists |
| abstract | A method is provided for growth of carbon nanotube (CNT) synthesis at a low temperature. The method includes preparing a catalyst by placing the catalyst between two metal layers of high chemical potential on a substrate, depositing such placed catalyst on a surface of a wafer, and reactivating the catalyst in a high vacuum at a room temperature in a catalyst preparation chamber to prevent a deactivation of the catalyst. The method also includes growing carbon nanotubes on the substrate in the high vacuum in a CNT growth chamber after preparing the catalyst. |
| priorityDate | 2007-01-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 19.