| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_069a92549123806a5d654dc036a676e9 |
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2224-48227
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2806
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-24564
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01067
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-20228
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01019
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-082
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-202
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-01078
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-12032
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L2924-3025
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01J2237-2817 |
| classificationCPCInventive |
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| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N23-225
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-06
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http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01Q30-02
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01J37-073 |
| filingDate |
2008-06-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f987da517db545fcc5ec67efdf268d79
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_6f9318ed995a48f5baf8e3d78b752556
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bf13b53d1d63d519fa3bdbcd284c76fa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_16f05ee62667b5b31cd8e0c286d62aaa
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_202cadaeddde05297674b5fc391f52e5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_ac7f66f3c1d09fff77ae785c13fc8764
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_866fe99d3c7d10788b7ce098d601c1b5
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_e67d0a81c1e378e9a21a3840d080848f
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3c89059aadb7f972db8acb81e45567d9
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_cf18a6ab5311f5fd215f34b6c2143886
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a64340d139811583a8b6fc56642f14fb
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_86056225dc4c30672104f49664b4bed1 |
| publicationDate |
2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7928378-B2 |
| titleOfInvention |
Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| abstract |
A substrate inspection apparatus 1 - 1 (FIG. 1 ) of the present invention performs the following steps of: carrying a substrate “S” to be inspected into an inspection chamber 23 - 1 ; maintaining a vacuum in said inspection chamber; isolating said inspection chamber from a vibration; moving successively said substrate by means of a stage 26 - 1 with at least one degree of freedom; irradiating an electron beam having a specified width; helping said electron beam reach to a surface of said substrate via a primary electron optical system 10 - 1 ; trapping secondary electrons emitted from said substrate via a secondary electron optical system 20 - 1 and guiding it to a detecting system 35 - 1 ; forming a secondary electron image in an image processing system based on a detection signal of a secondary electron beam obtained by said detecting system; detecting a defective location in said substrate based on the secondary electron image formed by said image processing system; indicating and/or storing said defective location in said substrate by CPU 37 - 1 ; and taking said completely inspected substrate out of the inspection chamber. Thereby, the defect inspection on the substrate can be performed successively with high level of accuracy and efficiency as well as with higher throughput. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8213739-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011102574-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011115493-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8217349-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8455823-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2010200747-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11521822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012020567-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8891877-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011233399-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8089044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8430705-B1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9003167-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8639018-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012032076-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/TW-I811653-B |
| priorityDate |
2000-12-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |