| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_ff87761a3ed2678af453a89f33169de5 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-304
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/B24D11-00 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B7-22
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B24B37-26
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-304 |
| filingDate |
2008-05-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_397f45e3aab28a1c3181e52d2ddae575
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b802128dcd37c62867870f521cb259b8
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_b12d85b4d01a5fa902b03aa9e6ed0143
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_760161eb65e51e70a862f64010d8ebf2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_775cbfde7652a581b9bc7062fc960acc
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_bb7485cb92e8d1b75f614640e73b9fb4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_a57cfc716fad88253f72a09acbcd7b9f |
| publicationDate |
2011-04-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7927187-B2 |
| titleOfInvention |
Method of polishing a target surface |
| abstract |
A circular polishing pad has grooves formed on the surface in a spiral pattern with its center point offset from the center of the pad. The spiral pattern is an Archimedean spiral pattern or a parabolic spiral pattern. A target object is polished by using such a polishing pad without oscillating the platen to which the polishing pad is pasted or the polishing head that holds the target object. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009191794-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9409276-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10625393-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9656366-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10076820-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11504822-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8118645-B2 |
| priorityDate |
2007-05-25-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |