| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4efee27937b4a512f45809fed5293747 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10778
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C01B33-10794 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-14
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C01B33-107
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/B01D3-34 |
| filingDate |
2005-11-14-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4480488e22c3f9948b0e0df32ee66eee |
| publicationDate |
2011-02-01-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7879198-B2 |
| titleOfInvention |
Processes for the purification of trichlorosilane and silicon tetrachloride |
| abstract |
The present disclosure relates to processes and systems for purifying technical grade trichlorosilane and/or technical grade silicon tetrachloride into electronic grade trichlorosilane and/or electronic grade silicon tetrachloride. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2018244529-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524044-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8691055-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8524048-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10584035-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/CN-110790785-A
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10011493-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8535488-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012080303-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012080304-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2012145530-A1 |
| priorityDate |
2004-11-19-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |