http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7871677-B2
Outgoing Links
| Predicate | Object |
|---|---|
| assignee | http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_88b011d9e77f8387268cb9f3e0871e21 |
| classificationCPCAdditional | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8404 |
| classificationCPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-302 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G11B5-8404 |
| classificationIPCInventive | http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-27 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-39 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-31 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H05H1-24 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G11B5-84 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/C23C16-48 http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L21-316 |
| filingDate | 2003-07-09-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate | 2011-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor | http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_1a343b6f409870ea8311b7b7df8483bb |
| publicationDate | 2011-01-18-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber | US-7871677-B2 |
| titleOfInvention | Surface treating method for substrate |
| abstract | A surface treating method for a conductive substrate by using a photo-excitation process, wherein a conducive substrate is placed in a process chamber ( 1 ) maintained between 0.001-1 atmospheric pressure, while a negative bias voltage is applied to a substrate ( 2 ), ultraviolet having a photo energy of 3-10 eV larger than the work function of the substrate surface is applied from a ultraviolet source ( 5 ) housed in a chamber having a light output window, and a process gas is supplied into the process chamber container ( 1 ) to thereby produce ions and radicals ( 6 ) caused by the collision of process gas molecules with emitted electrons from the substrate surface and allow them to reach the surface of the substrate ( 2 ), whereby it is possible to surface-treat a substrate simply, highly efficiently, inexpensively and easily even in the case of a large-area substrate. |
| isCitedBy | http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9953665-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10888895-B2 |
| priorityDate | 2002-07-10-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type | http://data.epo.org/linked-data/def/patent/Publication |
Incoming Links
Total number of triples: 41.