http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-7862990-B2

Outgoing Links

Predicate Object
assignee http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_aafe0172ffd94d3486c518b0709bb2b3
classificationCPCAdditional http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S438-952
classificationCPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-10
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-11
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-091
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/C08G61-02
classificationIPCInventive http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-40
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-11
filingDate 2007-12-31-04:00^^<http://www.w3.org/2001/XMLSchema#date>
grantDate 2011-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
inventor http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_f6a491e3e9602e78c76c99d08433a485
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_4445ca5d86e19df7d61dce3199573d81
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c1d8437a12a5c31790722da5174933c2
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_69450853bcb776b620d41bdea10319b3
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_7fb99758c98ee8b0a4f908e5d08022e4
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97bfb8a879949b6e6004edb6c7022d0e
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_97240472e42630393a28ec89dd85f208
publicationDate 2011-01-04-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7862990-B2
titleOfInvention Polymer having antireflective properties and high carbon content, hardmask composition including the same, and process for forming a patterned material layer
abstract An antireflective hardmask composition includes an organic solvent, an initiator, and at least one polymer represented by Formulae A, B, or C as set forth in the specification.
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9116429-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10377848-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9676892-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9880469-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9334357-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9809672-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011117501-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9093500-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9540476-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9725389-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-10345706-B2
priorityDate 2006-12-30-04:00^^<http://www.w3.org/2001/XMLSchema#date>
type http://data.epo.org/linked-data/def/patent/Publication

Incoming Links

Predicate Subject
isCitedBy http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006019195-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/WO-2007105776-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006234158-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009098486-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2008160460-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2004259037-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006251990-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2006204891-A1
isDiscussedBy http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128553850
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID91471638
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128376307
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14438476
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128779993
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID143333025
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID239943404
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID16932
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128706521
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7850
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID322893802
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393818
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456295124
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21387
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456295123
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7344
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID160897855
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID42292
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88908259
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405643
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID88908258
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID426683440
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456295125
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID21871889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID136258700
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157350900
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID423401636
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127780673
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393280
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID77943
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID407611241
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414028185
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226395597
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393282
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID246873948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142432243
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129857137
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID31423
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11604403
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID11728255
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID416011437
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142295263
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID89590338
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID237402203
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393352
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID230487424
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID453623595
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID412016948
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID247065264
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID14967159
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458397310
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66842551
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442430
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226442429
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450670427
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142299893
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6853
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128562115
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID23369087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID53714540
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID230306507
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226547586
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID427793505
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID297
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID247355947
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142310869
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129190840
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID157890667
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448558616
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129823098
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226410325
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449266279
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7734
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID86743108
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142290996
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID447850147
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058049
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7005
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226502465
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128854081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID249251716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414860678
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID66906906
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7946
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7618
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID101064608
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID452741220
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID135947026
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419559581
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226572439
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127606384
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142310825
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7002
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419523291
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7406
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID561663
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID143333015
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID420318165
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID247817275
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456253128
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6547
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID129390487
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID158342369
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID415764094
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226397065
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID448794171
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID931
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID977
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID466102
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138195035
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID414871446
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248026222
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID232376179
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID450273274
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128768478
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID76716
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID449164324
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID15913
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID425199706
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128436482
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID248307493
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127750531
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405986
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226405985
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID227343087
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID159437304
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458393356
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138195032
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID454482646
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142057584
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID87058081
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID413305760
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127490147
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138195034
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419546281
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID89590316
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127520078
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226713266
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID521998
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138195033
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID81239
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID141560067
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID128577468
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID7039
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID458392451
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226393977
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID311094236
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID123256034
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID575517
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456294426
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID239943431
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226441294
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456294413
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456295122
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID410568071
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456294429
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID22598901
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID62347
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456291407
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142291115
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226429889
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456282598
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID419484822
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID138195036
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID237423920
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID456294412
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226415128
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127705967
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID237423919
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID141653085
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID142291074
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID6163
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID127723447
http://rdf.ncbi.nlm.nih.gov/pubchem/substance/SID226735952
http://rdf.ncbi.nlm.nih.gov/pubchem/compound/CID12749

Total number of triples: 217.