| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_c16d2144a81bfa32a665dca1e93c3d37 |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N2001-4061
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10T436-25125 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N1-4055
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G01N30-96
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F1-84
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-12
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L22-30
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-0274 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G01N33-00 |
| filingDate |
2008-08-22-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9fdc2fa5b2c55d3666ca61128c0536cf
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_d37e3c3aff4fb4b74abd3c3e5d70876a
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_45e42940eb33890dbd778286dbd0be2c
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_c480884dc8e969e92a3e04c8a90854cd |
| publicationDate |
2010-11-30-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7842916-B2 |
| titleOfInvention |
Method of and apparatus for analyzing ions adsorbed on surface of mask |
| abstract |
A method of analyzing ions adsorbed on a surface of a mask for pattern formation of a semiconductor device, and an apparatus using the same are disclosed. The ion analyzing method includes: filling a heating container within a main chamber with a predetermined amount of a solvent; immersing a mask in the solvent-filled heating container; raising an internal pressure of the chamber to a predetermined level by supplying gas into the chamber; separating ions from a surface of the mask by heating the solvent within the heating container at a predetermined temperature for a predetermined period; and analyzing the ions by collecting the solvent. |
| priorityDate |
2007-08-24-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |