Predicate |
Object |
assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_a0f26a9c2efad3ae086a108f3c04b57d |
classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-665 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L27-1203 |
classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-66659 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823807 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823878 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L21-823892 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-1045 http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/H01L29-7835 |
classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/H01L29-02 |
filingDate |
2007-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
grantDate |
2010-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_3f5417b477b92a2c171378ba5218565a |
publicationDate |
2010-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
publicationNumber |
US-7838930-B1 |
titleOfInvention |
Insulated-gate field-effect transistor with hypoabrupt step change in body dopant concentration below source/drain zone |
abstract |
An insulated-gate field-effect transistor ( 500, 510, 530, or 540 ) has a hypoabrupt step-change vertical dopant profile below one ( 104 or 564 ) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material ( 108 or 568 ). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material largely undergoes a step increase by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone. |
isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2009250789-A1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8148777-B1 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8610207-B2 http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8035196-B2 |
priorityDate |
2005-08-29-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
type |
http://data.epo.org/linked-data/def/patent/Publication |