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filingDate 2007-10-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
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publicationDate 2010-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date>
publicationNumber US-7838930-B1
titleOfInvention Insulated-gate field-effect transistor with hypoabrupt step change in body dopant concentration below source/drain zone
abstract An insulated-gate field-effect transistor ( 500, 510, 530, or 540 ) has a hypoabrupt step-change vertical dopant profile below one ( 104 or 564 ) of its source/drain zones for reducing the parasitic capacitance along the pn junction between that source/drain zone and adjoining body material ( 108 or 568 ). In particular, the concentration of semiconductor dopant which defines the conductivity type of the body material largely undergoes a step increase by at least a factor of 10 in moving from that source/drain zone down to an underlying body-material location no more than 10 times deeper below the upper semiconductor surface than that source/drain zone.
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