| Predicate |
Object |
| assignee |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentassignee/MD5_4d72711e97d894c55af805c9de2053ab |
| classificationCPCAdditional |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-38
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-111
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/Y10S430-106 |
| classificationCPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-20
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0382
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0397
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0045
http://rdf.ncbi.nlm.nih.gov/pubchem/patentcpc/G03F7-0047 |
| classificationIPCInventive |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-004
http://rdf.ncbi.nlm.nih.gov/pubchem/patentipc/G03F7-30 |
| filingDate |
2008-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| grantDate |
2010-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| inventor |
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_9e502fb082947d46cdde81aa2805de59
http://rdf.ncbi.nlm.nih.gov/pubchem/patentinventor/MD5_2542172aea443ab8e6be4d51d80b50fa |
| publicationDate |
2010-11-23-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| publicationNumber |
US-7838199-B2 |
| titleOfInvention |
Polymers and photoresist compositions |
| abstract |
The invention relates to new polymers that comprise units that contain one or more photoacid generator groups and photoresists that contain the polymers. Preferred polymers of the invention are suitable for use in photoresists imaged at short wavelengths such as sub-250 nm or sub-200 nm, particularly 248 nm and 193 nm. |
| isCitedBy |
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011159429-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-8507176-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2011236823-A1
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-11613519-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-9983477-B2
http://rdf.ncbi.nlm.nih.gov/pubchem/patent/US-2022397827-A1 |
| priorityDate |
2007-02-28-04:00^^<http://www.w3.org/2001/XMLSchema#date> |
| type |
http://data.epo.org/linked-data/def/patent/Publication |